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Keywords

deposition Conditions
Electrical Conductivity of ZnO
chemical vapor deposition (CVD)

Abstract

ABSTRACT ZnO thin films on glass substrate were prepared by chemical vapor deposition (CVD) using zinc acetate as a starting material. Electrical properties of the films deposited at various substrate temperatures and sample position inside the chamber were investigated. Maximum conductivity is obtained for the film deposited at 550C and at a position 16 cm far from the inlet side of the gases.
https://doi.org/10.33899/edusj.2009.57924
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