Abstract
ABSTRACT: Rutherford backscattering spectrometry is considered as a very powerful tool in surface analysis among other various techniques employed. In this work a computer program had been built for detailed study of the important parameters that influence Rutherford backscattering spectrometry including the kinematic factor or (k factor), mass resolution, Rutherford backscattering cross section, Andersen and L.Ecuyer correction factores. The simulation had been carried out for different mass target atoms, scattering angles and ion energies. Most of the data obtained are not avaliable in the literature for comparison.
